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Effect of Ceria Abrasive Synthesized by Supercritical Hydrothermal Method for Chemical Mechanical Planarization
Choi, Jinhak, Shin, Cheolmin, Yang, Jichul, Chae, Seung-Ki, Kim, TaesungVolume:
8
Year:
2019
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0221905jss
File:
PDF, 914 KB
2019