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Evaluation of Size Distribution Measurement Methods for Sub-100 nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry
Shin, Cheolmin, Choi, Jinhak, Kwak, Donggeon, Kim, Juhwan, Yang, Jichul, Chae, Seung-ki, Kim, TaesungVolume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0261905jss
File:
PDF, 1.22 MB
english, 2019