Fixed Charge Control of Silylated Surface for Stiction-Free...

Solid State Phenomena 2018 / 8 Vol. 282

Fixed Charge Control of Silylated Surface for Stiction-Free Drying with Surface Energy Reduction Process

Koide, Tatsuhiko, Kimura, Shinsuke, Kobayashi, Takashi, Iimori, Hiroyasu, Tomohiko, Sugita, Sato, Katsuhiro, Ogawa, Yoshihiro
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Volume:
282
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.282.168
Date:
August, 2018
File:
PDF, 1.07 MB
english, 2018
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