Impact of Thickness Control of Hf 0.5...

IEEE Electron Device Letters 2019 / 7 Vol. 40; Iss. 7

Impact of Thickness Control of Hf 0.5 Zr 0.5 O 2 Films for the Metal–Ferroelectric–Insulator–Semiconductor Capacitors

Min, Dae-Hong, Kang, Seung Youl, Moon, Seung-Eon, Yoon, Sung-Min
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Volume:
40
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2019.2917032
Date:
July, 2019
File:
PDF, 491 KB
english, 2019
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