A Vertical Superjunction MOSFET With n-Si and p-3C-SiC Pillars
Huang, Mingmin, Deng, Youqi, Lai, Li, Yang, Zhimei, Gao, Bo, Gong, MinVolume:
66
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2019.2929831
Date:
September, 2019
File:
PDF, 2.14 MB
english, 2019