A Micro corona motor fabricated by a SU-8 built-on X-ray mask
S. Lee, D. Kim, Y. Jin, Y. Han, Y. Desta, M. D. Bryant, J. GoettertVolume:
10
Language:
english
Pages:
5
DOI:
10.1007/s00542-004-0385-4
Date:
October, 2004
File:
PDF, 361 KB
english, 2004