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Parallel-beams/lever electrothermal out-of-plane actuator
S. Deladi, G. Krijnen, M.C. ElwenspoekVolume:
10
Language:
english
Pages:
7
DOI:
10.1007/s00542-004-0423-2
Date:
August, 2004
File:
PDF, 417 KB
english, 2004