New electroforming technology pressure aid for LIGA process

New electroforming technology pressure aid for LIGA process

T.-H. Tsai, H. Yang, R. Chein
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Volume:
10
Language:
english
Pages:
6
DOI:
10.1007/s00542-004-0425-0
Date:
August, 2004
File:
PDF, 672 KB
english, 2004
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