The evaporated metal masks for chemical glass etching for...

Microsystem Technologies 2005 / 02 Vol. 11; Iss. 2-3

The evaporated metal masks for chemical glass etching for BioMEMS

Y. Mourzina, A. Steffen, A. Offenhäusser
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Pages:
6
DOI:
10.1007/s00542-004-0430-3
Date:
February, 2005
File:
PDF, 395 KB
english, 2005
Conversion to is in progress
Conversion to is failed