Volume 11; Issue 2-3

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Microsystem Technologies
Volume 11; Issue 2-3

Microsystem Technologies

Volume 11; Issue 2-3

1

Casimir effect on the pull-in parameters of nanometer switches

W.-H. Lin, Y.-P. Zhao

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 284 KB

english, 2005

2

High temperature resistant antireflective moth-eye structures for infrared radiation sensors

T. Glaser, A. Ihring, W. Morgenroth, N. Seifert, S. Schröter, V. Baier

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 416 KB

english, 2005

3

The evaporated metal masks for chemical glass etching for BioMEMS

Y. Mourzina, A. Steffen, A. Offenhäusser

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 395 KB

english, 2005

4

Electrical detection of DNA hybridization with multilayer gold nanoparticles between nanogap electrodes

C.-Y. Tsai, Y.-H. Tsai, C.-C. Pun, B. Chan, T.-Y. Luh, C.-C. Chen, F.-H. Ko, P.-J. Chen, P.-H. Chen

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 450 KB

english, 2005

5

A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure

Y. Chen, J. Jiao, B. Xiong, L. Che, X. Li, Y. Wang

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 488 KB

english, 2005

6

Bulk micromachining fabrication platform using the integration of DRIE and wet anisotropic etching

Huai-Yuan Chu, Weileun Fang

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 1.29 MB

english, 2005

7

Laser beam soldering – a new assembly technology for microoptical systems

H. Banse, E. Beckert, R. Eberhardt, W. Stöckl, J. Vogel

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 654 KB

english, 2005

8

A new pre-etching pattern to determine 〈110〉 crystallographic orientation on both (100) and (110) silicon wafers

W.-H. Chang, Y.-C. Huang

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 1.55 MB

english, 2005

9

Tuning the quality factor of bulk micromachined structures using squeezed-film damping

C.-C. Cheng, W. Fang

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 667 KB

english, 2005

10

Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy

J. Qian, T.-X. Yu, Y.-P. Zhao

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 452 KB

english, 2005

11

Metallic microstructures by electroforming from conducting polymer templates

N. Holstein, G. Schanz, J. Konys, V. Piotter, R. Ruprecht

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 732 KB

english, 2005

12

Investigations of the capillary effect for gripping silicon chips

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 457 KB

english, 2005

13

Laser scanning path generation considering photopolymer solidification in micro-stereolithography

Y. H. Cho, I. H. Lee, D.-W. Cho

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 756 KB

english, 2005

14

A novel method for determining Young’s modulus of thin films by micro-strain gauges

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 372 KB

english, 2005

15

Silicon MEMS components: a fatigue life assessment approach

A. Varvani-Farahani

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 270 KB

english, 2005

16

A robust and reliable stress-induced self-assembly supporting mechanism for optical devices

Y.-P. Ho, M. Wu, H.-Y. Lin, W. Fang

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 549 KB

english, 2005

17

3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer

Jong-Yeon Park, Kun-Tae Kim, Hyun-Joon Shin, Sung Moon, James Jungho Pak

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 947 KB

english, 2005

18

A simple micro-mixer prototyped in polycarbonate

Stephen Wan, Xu Diao, Zheng Hongyu, Ng Teng Yong

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 298 KB

english, 2005

19

Overcoming SU-8 stiction in high aspect ratio structures

A. G. Peele, B. Y. Shew, K. D. Vora, H. C. Li

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 258 KB

english, 2005

20

A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications

W. T. Lin, J. C. Chiou, C. Tsou

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 489 KB

english, 2005

21

Injection molding of 3D microstructures byμPIM

B.Y. Tay, L. Liu, N.H. Loh, S.B. Tor, Y. Murakoshi, R. Maeda

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 376 KB

english, 2005

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