A new pre-etching pattern to determine 〈110〉...

Microsystem Technologies 2005 / 02 Vol. 11; Iss. 2-3

A new pre-etching pattern to determine 〈110〉 crystallographic orientation on both (100) and (110) silicon wafers

W.-H. Chang, Y.-C. Huang
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Volume:
11
Language:
english
Pages:
12
DOI:
10.1007/s00542-004-0456-6
Date:
February, 2005
File:
PDF, 1.55 MB
english, 2005
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