Two-dimensional stress measurement of a micromachined...

Microsystem Technologies 2005 / 02 Vol. 11; Iss. 2-3

Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy

J. Qian, T.-X. Yu, Y.-P. Zhao
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Volume:
11
Language:
english
Pages:
7
DOI:
10.1007/s00542-004-0460-x
Date:
February, 2005
File:
PDF, 452 KB
english, 2005
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