A robust and reliable stress-induced self-assembly...

Microsystem Technologies 2005 / 02 Vol. 11; Iss. 2-3

A robust and reliable stress-induced self-assembly supporting mechanism for optical devices

Y.-P. Ho, M. Wu, H.-Y. Lin, W. Fang
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Volume:
11
Language:
english
Pages:
7
DOI:
10.1007/s00542-004-0477-1
Date:
February, 2005
File:
PDF, 549 KB
english, 2005
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