3D Optical microstructure fabrication and its bonding to...

Microsystem Technologies 2005 / 02 Vol. 11; Iss. 2-3

3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer

Jong-Yeon Park, Kun-Tae Kim, Hyun-Joon Shin, Sung Moon, James Jungho Pak
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Volume:
11
Language:
english
Pages:
11
DOI:
10.1007/s00542-004-0482-4
Date:
February, 2005
File:
PDF, 947 KB
english, 2005
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