Overcoming SU-8 stiction in high aspect ratio structures
A. G. Peele, B. Y. Shew, K. D. Vora, H. C. LiVolume:
11
Language:
english
Pages:
4
DOI:
10.1007/s00542-004-0488-y
Date:
February, 2005
File:
PDF, 258 KB
english, 2005