A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications
W. T. Lin, J. C. Chiou, C. TsouVolume:
11
Language:
english
Pages:
6
DOI:
10.1007/s00542-004-0491-3
Date:
February, 2005
File:
PDF, 489 KB
english, 2005