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Yield analysis via induction of process statistics into the design of MEMS and other microsystems
Shyam Praveen Vudathu, Kishore Kumar Duganapalli, Rainer Laur, Dorota Kubalińska, Angelika Bunse-GerstnerVolume:
13
Language:
english
Pages:
7
DOI:
10.1007/s00542-006-0263-3
Date:
July, 2007
File:
PDF, 411 KB
english, 2007