Volume 13; Issue 11-12

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Microsystem Technologies
Volume 13; Issue 11-12

Microsystem Technologies

Volume 13; Issue 11-12

1

Yield analysis via induction of process statistics into the design of MEMS and other microsystems

Shyam Praveen Vudathu, Kishore Kumar Duganapalli, Rainer Laur, Dorota Kubalińska, Angelika Bunse-Gerstner

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 411 KB

english, 2007

2

Concave microlens array mold fabrication in photoresist using UV proximity printing

Tsung-Hung Lin, Hsiharng Yang, Ching-Kong Chao

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 519 KB

english, 2007

3

Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect

Ruey Fang Shyu, Hsiharng Yang, Wen-Ren Tsai, Jhy-Cherng Tsai

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 328 KB

english, 2007

4

The design and fabrication of polymerase chain reaction platform

Chao-Heng Chien, Hui-Min Yu

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 342 KB

english, 2007

5

Miniaturized fluorescence excitation platform with optical fiber for bio-detection chips

Hsiharng Yang, Chung-Tze Lee, Fuh-Yu Chang

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 348 KB

english, 2007

6

Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

Jian Lu, Tsuyoshi Ikehara, Takeshi Kobayashi, Ryutaro Maeda, Takashi Mihara

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 393 KB

english, 2007

7

A novel contact resistance model of anisotropic conductive film for FPD packaging

G. J. Wang, Y. C. Lin, G. S. Lin

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 466 KB

english, 2007

8

Ultra fine pitch flat panel display packaging using 3

G. J. Wang, Y. C. Lin, G. S. Lin

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 230 KB

english, 2007

9

Characterization of flexible RF microcoils dedicated to local MRI

M. Woytasik, J.-C. Ginefri, J.-S. Raynaud, M. Poirier-Quinot, E. Dufour-Gergam, J.-P. Grandchamp, O. Girard, P. Robert, J.-P. Gilles, E. Martincic, L. Darrasse

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 298 KB

english, 2007

10

Au–Sn flip-chip solder bump for microelectronic and optoelectronic applications

Jeong-Won Yoon, Hyun-Suk Chun, Ja-Myeong Koo, Seung-Boo Jung

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 452 KB

english, 2007

11

Design and modeling of electromagnetic actuator in mems-based valveless impedance pump

Hsien-Tsung Chang, Chia-Yen Lee, Chih-Yung Wen

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 333 KB

english, 2007

12

Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators

Christophe Serre, Alejandro Pérez-Rodríguez, Nuria Fondevilla, Joan Ramon Morante, Josep Montserrat, Jaume Esteve

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 297 KB

english, 2007

13

Power processing circuits for electromagnetic, electrostatic and piezoelectric inertial energy scavengers

P. D. Mitcheson, T. C. Green, E. M. Yeatman

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 262 KB

english, 2007

14

Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, A. Barthélemy

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 393 KB

english, 2007

15

Development of a multi-layer microelectrofluidic platform

S. H. Ng, Z. F. Wang, R. T. Tjeung, N. F. de Rooij

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 351 KB

english, 2007

16

Recent developments in MEMS-based miniature fuel cells

Tristan Pichonat, Bernard Gauthier-Manuel

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 296 KB

english, 2007

17

A new scanning MEMS mirror

Z. F. Wang, W. Noell, M. Zickar, N. de Rooij, S. P. Lim

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 298 KB

english, 2007

18

Effect of surface finish of substrate on mechanical reliability of In-48Sn solder joints in MOEMS package

Ja-Myeong Koo, Seung-Boo Jung

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 319 KB

english, 2007

19

Design and development of sub-micron scale specimens with electroplated structures for the microtensile testing of thin films

Ming-Tzer Lin, Chi-Jia Tong, Chung-Hsun Chiang

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 340 KB

english, 2007

20

Studies on a micro turbine device with both journal- and thrust-air bearings

X. C. Shan, Q. D. Zhang, Y. F. Sun, R. Maeda

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 669 KB

english, 2007

21

Design of bossed silicon membranes for high sensitivity microphone applications

P. Martins, S. Beclin, S. Brida, S. Metivet, O. Stojanovic, C. Malhaire

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 413 KB

english, 2007

22

MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter

Yi Chiu, Chiung-Ting Kuo, Yu-Shan Chu

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 470 KB

english, 2007

23

Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps

Nicoleta Diana Badila Ciressan, Cyrille Hibert, Marco Mazza, Adrian M. Ionescu

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 508 KB

english, 2007

24

MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

A. Mehdaoui, M. B. Pisani, D. Tsamados, F. Casset, P. Ancey, A. M. Ionescu

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 324 KB

english, 2007

25

A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200

R. Hellín Rico, J.-P. Celis, K. Baert, C. Van Hoof, A. Witvrouw

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 315 KB

english, 2007

26

Scaling effects for electromagnetic vibrational power generators

Terence O’Donnell, Chitta Saha, Steve Beeby, John Tudor

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 412 KB

english, 2007

27

High quality factor copper inductors integrated in deep dry-etched quartz substrates

C. Leroy, M. B. Pisani, C. Hibert, D. Bouvet, M. Puech, A. M. Ionescu

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 312 KB

english, 2007

28

Design and fabrication of the concentric circle light guiding plate for LED-backlight module by MEMS technique

Chao-Heng Chien, Zhi-Peng Chen

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 488 KB

english, 2007

29

High viscous liquids as a source in micro-screw heat exchanger: fabrication, simulation and experiments

Haifa El-Sadi, Nabil Esmail, Andreas K. Athienitis

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 381 KB

english, 2007

30

Design, test, integration and packaging of MEMS/MOEMS, 2006

B. Michel, B. Courtois

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 74 KB

english, 2007

31

Experimental comparison of macro and micro scale electromagnetic vibration powered generators

S. P. Beeby, M. J. Tudor, R. N. Torah, S. Roberts, T. O’Donnell, S. Roy

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 342 KB

english, 2007

32

A novel packaging approach for RF MEMS switching functions on alumina substrate

Mohamad El Khatib, Arnaud Pothier, Aurelian Crunteanu, Pierre Blondy

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 475 KB

english, 2007

33

High current densities in copper microcoils: influence of substrate on failure mode

Johan Moulin, Marion Woytasik, Jean-Paul Grandchamp, Elisabeth Dufour-Gergam, Alain Bosseboeuf

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 390 KB

english, 2007

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