![](/img/cover-not-exists.png)
A new scanning MEMS mirror
Z. F. Wang, W. Noell, M. Zickar, N. de Rooij, S. P. LimVolume:
13
Language:
english
Pages:
5
DOI:
10.1007/s00542-006-0343-4
Date:
July, 2007
File:
PDF, 298 KB
english, 2007