Design and development of sub-micron scale specimens with...

Microsystem Technologies 2007 / 07 Vol. 13; Iss. 11-12

Design and development of sub-micron scale specimens with electroplated structures for the microtensile testing of thin films

Ming-Tzer Lin, Chi-Jia Tong, Chung-Hsun Chiang
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Volume:
13
Language:
english
Pages:
7
DOI:
10.1007/s00542-006-0345-2
Date:
July, 2007
File:
PDF, 340 KB
english, 2007
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