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Design of bossed silicon membranes for high sensitivity microphone applications
P. Martins, S. Beclin, S. Brida, S. Metivet, O. Stojanovic, C. MalhaireVolume:
13
Language:
english
Pages:
6
DOI:
10.1007/s00542-006-0347-0
Date:
July, 2007
File:
PDF, 413 KB
english, 2007