MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter
Yi Chiu, Chiung-Ting Kuo, Yu-Shan ChuVolume:
13
Language:
english
Pages:
7
DOI:
10.1007/s00542-006-0348-z
Date:
July, 2007
File:
PDF, 470 KB
english, 2007