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MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive
A. Mehdaoui, M. B. Pisani, D. Tsamados, F. Casset, P. Ancey, A. M. IonescuVolume:
13
Language:
english
Pages:
6
DOI:
10.1007/s00542-006-0350-5
Date:
July, 2007
File:
PDF, 324 KB
english, 2007