High current densities in copper microcoils: influence of...

Microsystem Technologies 2007 / 07 Vol. 13; Iss. 11-12

High current densities in copper microcoils: influence of substrate on failure mode

Johan Moulin, Marion Woytasik, Jean-Paul Grandchamp, Elisabeth Dufour-Gergam, Alain Bosseboeuf
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Volume:
13
Language:
english
Pages:
6
DOI:
10.1007/s00542-007-0391-4
Date:
July, 2007
File:
PDF, 390 KB
english, 2007
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