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Shape optimizations and static/dynamic characterizations of deformable microplate structures with multiple electrostatic actuators
Yunqiang Li, Muthukumaran Packirisamy, Rama B. BhatVolume:
14
Language:
english
Pages:
12
DOI:
10.1007/s00542-007-0420-3
Date:
February, 2008
File:
PDF, 487 KB
english, 2008