Volume 14; Issue 2

Microsystem Technologies

Volume 14; Issue 2
3

Anisotropically etched silicon fibre-grippers

Year:
2008
Language:
english
File:
PDF, 250 KB
english, 2008
6

Dynamic characteristics of micro air bearings for microsystems

Year:
2008
Language:
english
File:
PDF, 393 KB
english, 2008
9

Shrinkage ratio of PDMS and its alignment method for the wafer level process

Year:
2008
Language:
english
File:
PDF, 308 KB
english, 2008
17

Characterization of a novel segmented micro mirror

Year:
2008
Language:
english
File:
PDF, 361 KB
english, 2008
19

Peristaltic micropump system with piezoelectric actuators

Year:
2008
Language:
english
File:
PDF, 424 KB
english, 2008