Germanium resistors for RF MEMS based microsystems

Microsystem Technologies 2008 / 04 Vol. 14; Iss. 4-5

Germanium resistors for RF MEMS based microsystems

K. Grenier, C. Bordas, S. Pinaud, L. Salvagnac, D. Dubuc
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Volume:
14
Language:
english
Pages:
6
DOI:
10.1007/s00542-007-0448-4
Date:
April, 2008
File:
PDF, 336 KB
english, 2008
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