Volume 14; Issue 4-5

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Microsystem Technologies
Volume 14; Issue 4-5

Microsystem Technologies

Volume 14; Issue 4-5

1

Bismuth film electrodes for heavy metals determination

Vlastimil Rehacek, Ivan Hotovy, Marian Vojs, Fedor Mika

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 816 KB

english, 2008

2

Coupling coefficient determination based on simulation and experiment for ST-Cut quartz saw delay-line response

Yi-Chu Hsu, Ngoc-Bich Le

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 545 KB

english, 2008

3

Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates

U. Schmid, A. Ababneh, H. Seidel, R. Wagner, K. Bauer

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 790 KB

english, 2008

4

Mixed metal oxide films as pH sensing materials

Edric Gill, Khalil Arshak, Arousian Arshak, Olga Korostynska

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 402 KB

english, 2008

5

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 617 KB

english, 2008

6

Wafer-level plasma activated bonding: new technology for MEMS fabrication

Viorel Dragoi, Gerald Mittendorfer, Christine Thanner, Paul Lindner

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 298 KB

english, 2008

7

Design and consideration of wafer level micropackaging for distributed RF MEMS phase shifters

Xun-jun He, Qun Wu, Bo-shi Jin, Kai Tang, Ming-xin Song, Jing-hua Yin, Hui-cheng Zhu

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 346 KB

english, 2008

8

A labchip for highly selective and sensitive electrochemiluminescence detection of Hg2+ions in aqueous solution employing integrated amorphous thin film diodes

Heiko Schäfer, Hengwei Lin, Michael Schmittel, Markus Böhm

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 2.02 MB

english, 2008

9

Measurement of the pressure broadening coefficients of the oxygen A-band using a low cost, polarization stabilized, widely tunable vertical-cavity surface-emitting laser

Benjamin Scherer, Jürgen Wöllenstein, Matthias Weidemüller, Wenzel Salzmann, Johannes Michael Ostermann, Fernando Rinaldi, Rainer Michalzik

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 453 KB

english, 2008

10

Dye and polymer based light sensor for tag integration

Ilker Sayhan, Marie-Luise Bauersfeld, Juergen Woellenstein, Thomas Becker

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 409 KB

english, 2008

11

Optimizing the performance of a Coriolis-based angular rate sensor applying an analytical approach

A. Kulygin, M. Gergen, U. Schmid, H. Seidel

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 505 KB

english, 2008

12

Investigation of fabrication and encapsulation processes for a flexible tag microlab

E. Abad, B. Mazzolai, A. Juarros, D. Gómez, A. Mondini, I. Sayhan, A. Krenkow, Th. Becker

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 532 KB

english, 2008

13

Ultra-low-power components for an RFID Tag with physical and chemical sensors

Stefano Zampolli, Ivan Elmi, Enrico Cozzani, Gian Carlo Cardinali, Andrea Scorzoni, Michele Cicioni, Santiago Marco, Francisco Palacio, Jose M. Gómez-Cama, Ilker Sayhan, Thomas Becker

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 382 KB

english, 2008

14

Germanium resistors for RF MEMS based microsystems

K. Grenier, C. Bordas, S. Pinaud, L. Salvagnac, D. Dubuc

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 336 KB

english, 2008

15

Compensation methods for a silicon tuning fork gyroscope

Eik Arnold, Franz Nuscheler

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 510 KB

english, 2008

16

Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4and KOH solutions

A. Ababneh, H. Kreher, U. Schmid

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 1.22 MB

english, 2008

17

Fabrication and characterization of a passive silicon-based direct methanol fuel cell

J. P. Esquivel, N. Sabaté, J. Santander, N. Torres, C. Cané

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 442 KB

english, 2008

18

A new micromachined sensor system for tactile measurements of high aspect ratio microstructures

M. Balke, E. Peiner, L. Doering

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 465 KB

english, 2008

19

PNIPAM: a thermo-activated nano-material for use in optical devices

Solon Mias, Jan Sudor, Henri Camon

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 432 KB

english, 2008

20

A liquid chromatography miniaturised system for agrofood applications

Antonella Benvenuto, Leandro Lorenzelli, Cristian Collini, Vittorio Guarnieri, Andrea Adami, Elisa Morganti

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 346 KB

english, 2008

21

Gallium arsenide suspended microheater for MEMS sensor arrays

I. Hotovy, V. Rehacek, F. Mika, T. Lalinsky, S. Hascik, G. Vanko, M. Drzik

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 458 KB

english, 2008

22

Development of automated microrobot-based nanohandling stations for nanocharacterization

Sergej Fatikow, Volkmar Eichhorn, Florian Krohs, Iulian Mircea, Christian Stolle, Saskia Hagemann

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 575 KB

english, 2008

23

Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling

C. Bruchmann, B. Höfer, P. Schreiber, R. Eberhardt, W. Buss, T. Peschel, S. Gebhardt, A. Tünnermann, E. Beckert

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 477 KB

english, 2008

24

Nano- and microsized metal oxide thin film gas sensors

Stefan Palzer, Emmanuel Moretton, Francisco Hernandez Ramirez, Albert Romano-Rodriguez, Jürgen Wöllenstein

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 436 KB

english, 2008

25

VHDL Implementation of a communication interface for integrated MEMS

E. Magdaleno Castelló, M. Rodríguez Valido, A. J. Ayala Alfonso

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 601 KB

english, 2008

26

A compact optical multichannel system for ethylene monitoring

J. Hildenbrand, J. Wöllenstein, S. Hartwig, A. Eberhardt, B. Halford, M. Moreno, J. Fonollosa, L. Fonseca, J. Santander, R. Rubio, I. Gràcia, C. Cané

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 526 KB

english, 2008

27

Novel sensor design methodology for measurements of the complex solar wind–magnetospheric–ionospheric system

G. Dekoulis, F. Honary

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 613 KB

english, 2008

28

Ozone and gamma radiation sensing properties of In2O3:ZnO:SnO2thin films

O. Korostynska, K. Arshak, G. Hickey, E. Forde

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 335 KB

english, 2008

29

Three-dimensional simulation of sacrificial etching

Johann Cervenka, Hajdin Ceric, Siegfried Selberherr

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 362 KB

english, 2008

30

Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators

Christophe Serre, Alejandro Pérez-Rodríguez, Nuria Fondevilla, Emile Martincic, Susanna Martínez, Joan Ramon Morante, Josep Montserrat, Jaume Esteve

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 482 KB

english, 2008

31

RNA amplification chip with parallel microchannels and droplet positioning using capillary valves

Liv Furuberg, Michal Mielnik, Anja Gulliksen, Lars Solli, Ib-Rune Johansen, Jörg Voitel, Tobias Baier, Lutz Riegger, Frank Karlsen

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 531 KB

english, 2008

32

Special Issue of the Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2–4 May 2007

B. Michel, T. Becker, U. Schmid

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 95 KB

english, 2008

33

Micro actuators on the basis of thin SMA foils

M. Leester-Schädel, B. Hoxhold, C. Lesche, S. Demming, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 552 KB

english, 2008

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