Focussed ion beam based fabrication of...

Microsystem Technologies 2008 / 07 Vol. 14; Iss. 7

Focussed ion beam based fabrication of micro-electro-mechanical resonators

Daniel Grogg, Nicoleta Diana Badila-Ciressan, Adrian Mihai Ionescu
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Volume:
14
Language:
english
Pages:
5
DOI:
10.1007/s00542-007-0464-4
Date:
July, 2008
File:
PDF, 436 KB
english, 2008
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