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Volume 14; Issue 7
Main
Microsystem Technologies
Volume 14; Issue 7
Microsystem Technologies
Volume 14; Issue 7
1
Microcantilever-based weather station for temperature, humidity and flow rate measurement
Rong-Hua Ma
,
Chia-Yen Lee
,
Yu-Hsiang Wang
,
Hao-Jen Chen
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 467 KB
Your tags:
english, 2008
2
Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors
Yu-Hsiang Wang
,
Chia-Yen Lee
,
Che-Hsin Lin
,
Lung-Ming Fu
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 451 KB
Your tags:
english, 2008
3
Development and application of a diaphragm micro-pump with piezoelectric device
H. K. Ma
,
B. R. Hou
,
H. Y. Wu
,
C. Y. Lin
,
J. J. Gao
,
M. C. Kou
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 404 KB
Your tags:
english, 2008
4
Monotonic and fatigue testing of freestanding submicron thin beams application for MEMS
Ming-Tzer Lin
,
Chi-Jia Tong
,
Kai-Shiang Shiu
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 543 KB
Your tags:
english, 2008
5
Focussed ion beam based fabrication of micro-electro-mechanical resonators
Daniel Grogg
,
Nicoleta Diana Badila-Ciressan
,
Adrian Mihai Ionescu
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 436 KB
Your tags:
english, 2008
6
Design and characterization of a humidity sensor realized in LTCC-technology
W. Smetana
,
M. Unger
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 403 KB
Your tags:
english, 2008
7
Usage of porous Al2O3layers for RH sensing
Veronika Timár-Horváth
,
László Juhász
,
András Vass-Várnai
,
Gergely Perlaky
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 446 KB
Your tags:
english, 2008
8
Copper planar microcoils applied to magnetic actuation
Marion Woytasik
,
Johan Moulin
,
Emile Martincic
,
Anne-Lise Coutrot
,
Elisabeth Dufour-Gergam
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 425 KB
Your tags:
english, 2008
9
Surface generation analysis in micro end-milling considering the influences of grain
J. S. Wang
,
Y. D. Gong
,
G. Abba
,
K. Chen
,
J. S. Shi
,
G. Q. Cai
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 462 KB
Your tags:
english, 2008
10
A two-step etching method to fabricate nanopores in silicon
Gou-Jen Wang
,
Wei-Zheng Chen
,
Kang J. Chang
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 353 KB
Your tags:
english, 2008
11
Biodegradable polylactic acid microstructures for scaffold applications
Gou-Jen Wang
,
Kuan-Hsuan Ho
,
Cheng-Chih Hsueh
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 307 KB
Your tags:
english, 2008
12
Lamination and laser structuring for a microwell array
Erik Jung
,
Dion Manessis
,
Alexander Neumann
,
Lars Böttcher
,
Tanja Braun
,
Jörg Bauer
,
Herbert Reichl
,
Bruno Iafelice
,
Federica Destro
,
Roberto Gambari
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 462 KB
Your tags:
english, 2008
13
Development of a nanostructural microwave probe based on GaAs
Y. Ju
,
T. Kobayashi
,
H. Soyama
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 314 KB
Your tags:
english, 2008
14
Silicon on nothing MEMS electromechanical resonator
Cédric Durand
,
Fabrice Casset
,
Pascal Ancey
,
Fabienne Judong
,
Alexandre Talbot
,
Rémi Quenouillère
,
Denis Renaud
,
Stéphan Borel
,
Brigitte Florin
,
Lionel Buchaillot
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 485 KB
Your tags:
english, 2008
15
Studies of polymer deformation and recovery in micro hot embossing
Xuechuan Shan
,
Y. C. Liu
,
Y. C. Lam
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 436 KB
Your tags:
english, 2008
16
A compact package for integrated silicon thermal gas flow meters
P. Bruschi
,
V. Nurra
,
M. Piotto
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 531 KB
Your tags:
english, 2008
17
Modeling of large area hot embossing
M. Worgull
,
K. K. Kabanemi
,
J.-P. Marcotte
,
J.-F. Hétu
,
M. Heckele
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 430 KB
Your tags:
english, 2008
18
Study of a piezoelectric multimorph based micro-scanner
A. Chaehoi
,
M. Begbie
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 398 KB
Your tags:
english, 2008
19
From MEMS devices to smart integrated systems
O. Soeraasen
,
J. E. Ramstad
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 383 KB
Your tags:
english, 2008
20
Miniaturized variable-focus lens fabrication using liquid filling technique
Hsiharng Yang
,
Chung-Yao Yang
,
Mau-Shiun Yeh
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 406 KB
Your tags:
english, 2008
21
New horizontal frustum optical waveguide fabrication using UV proximity printing
Tsung-Hung Lin
,
Hsiharng Yang
,
Ruey Fang Shyu
,
Ching-Kong Chao
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 385 KB
Your tags:
english, 2008
22
A novelx-axis tuning fork gyroscope with “8 vertical springs-proofmass” structure on (111) silicon
Fei Duan
,
Jiwei Jiao
,
Yucai Wang
,
Ying Zhang
,
Binwei Mi
,
Jinpeng Li
,
Yuelin Wang
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 576 KB
Your tags:
english, 2008
23
Silicon microneedle array with biodegradable tips for transdermal drug delivery
Bangtao Chen
,
Jiashen Wei
,
Francis E. H. Tay
,
Yee Ting Wong
,
Ciprian Iliescu
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 345 KB
Your tags:
english, 2008
24
Sensing liquid density using resonant flexural plate wave devices with sol–gel PZT thin films
Jyh-Cheng Yu
,
Huang-Yao Lin
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 531 KB
Your tags:
english, 2008
25
Design and fabrication of the suspended high-Qspiral inductors with X-beams
M. C. Hsieh
,
D. K. Jair
,
C. S. Lin
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 380 KB
Your tags:
english, 2008
26
Polysilicon micro beams buckling with temperature-dependent properties
M. Shamshirsaz
,
M. B. Asgari
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 201 KB
Your tags:
english, 2008
27
Experimental characterization of electrostatically actuated in-plane bending of microcantilevers
A. Ballestra
,
E. Brusa
,
M. Gh Munteanu
,
A. Somà
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 447 KB
Your tags:
english, 2008
28
Editorial to special issue on design, test, integration and packaging of MEMS/MOEMS, 2007
Bernard Courtois
,
Bernd Michel
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 75 KB
Your tags:
english, 2008
29
Solving functional reliability issue for an optical electrostatic switch
H. Camon
,
C. Ganibal
,
N. Rapahoz
,
M. Trzmiel
,
C. Pisella
,
C. Martinez
,
S. Valette
Journal:
Microsystem Technologies
Year:
2008
Language:
english
File:
PDF, 334 KB
Your tags:
english, 2008
30
Sensing liquid density using resonant flexural plate wave devices with sol–gel PZT thin films
Jyh-Cheng Yu
,
Huang-Yao Lin
Journal:
Microsystem Technologies
Year:
2008
File:
PDF, 82 KB
Your tags:
2008
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