Copper planar microcoils applied to magnetic actuation

Microsystem Technologies 2008 / 07 Vol. 14; Iss. 7

Copper planar microcoils applied to magnetic actuation

Marion Woytasik, Johan Moulin, Emile Martincic, Anne-Lise Coutrot, Elisabeth Dufour-Gergam
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Volume:
14
Language:
english
Pages:
6
DOI:
10.1007/s00542-007-0467-1
Date:
July, 2008
File:
PDF, 425 KB
english, 2008
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