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Gallium arsenide suspended microheater for MEMS sensor arrays
I. Hotovy, V. Rehacek, F. Mika, T. Lalinsky, S. Hascik, G. Vanko, M. DrzikVolume:
14
Language:
english
Pages:
7
DOI:
10.1007/s00542-007-0470-6
Date:
April, 2008
File:
PDF, 458 KB
english, 2008