![](/img/cover-not-exists.png)
A compact package for integrated silicon thermal gas flow meters
P. Bruschi, V. Nurra, M. PiottoVolume:
14
Language:
english
Pages:
7
DOI:
10.1007/s00542-007-0490-2
Date:
July, 2008
File:
PDF, 531 KB
english, 2008