![](/img/cover-not-exists.png)
A novelx-axis tuning fork gyroscope with “8 vertical springs-proofmass” structure on (111) silicon
Fei Duan, Jiwei Jiao, Yucai Wang, Ying Zhang, Binwei Mi, Jinpeng Li, Yuelin WangVolume:
14
Language:
english
Pages:
5
DOI:
10.1007/s00542-007-0527-6
Date:
July, 2008
File:
PDF, 576 KB
english, 2008