Experimental characterization of electrostatically actuated in-plane bending of microcantilevers
A. Ballestra, E. Brusa, M. Gh Munteanu, A. SomàVolume:
14
Language:
english
Pages:
10
DOI:
10.1007/s00542-008-0597-0
Date:
July, 2008
File:
PDF, 447 KB
english, 2008