Influence of material stiffness and geometrical variations on the electro-thermally driven microactuator performance
M. Shamshirsaz, M. Maroufi, M. B. Asgari, M. GheisariehaVolume:
15
Language:
english
Pages:
5
DOI:
10.1007/s00542-008-0636-x
Date:
January, 2009
File:
PDF, 262 KB
english, 2009