A nano-metrology system with a two-dimensional combined...

Microsystem Technologies 2009 / 12 Vol. 15; Iss. 12

A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope

Jinwon Park, Moo-Yeon Lee, Dong-Yeon Lee
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Volume:
15
Language:
english
Pages:
6
DOI:
10.1007/s00542-009-0916-0
Date:
December, 2009
File:
PDF, 331 KB
english, 2009
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