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Volume 15; Issue 12
Main
Microsystem Technologies
Volume 15; Issue 12
Microsystem Technologies
Volume 15; Issue 12
1
Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers
Hamed Farahani
,
James K. Mills
,
William L. Cleghorn
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 730 KB
Your tags:
english, 2009
2
Multi-objective decision support system in numerical reliability optimization of modern electronic packaging
Łukasz Dowhań
,
Artur Wymysłowski
,
Rainer Dudek
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 612 KB
Your tags:
english, 2009
3
Thermal assisted direct bonding between structured glasses for lab-on-chip technology
Qiuping Chen
,
Qiuling Chen
,
Daniel Milanese
,
Monica Ferraris
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 235 KB
Your tags:
english, 2009
4
A methodology for quantitative evaluation of local electrical conductivity: from micron to submicron
Bing-Feng Ju
,
Lei Wu
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 648 KB
Your tags:
english, 2009
5
Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices
Nam Cao Hoai Le
,
Dzung Viet Dao
,
Ryuji Yokokawa
,
John C. Wells
,
Susumu Sugiyama
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 522 KB
Your tags:
english, 2009
6
Simulating the laser micromachining of a 3D flexible structure
Richárd Berenyi
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 429 KB
Your tags:
english, 2009
7
A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope
Jinwon Park
,
Moo-Yeon Lee
,
Dong-Yeon Lee
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 331 KB
Your tags:
english, 2009
8
Static and dynamic stabilities of a microbeam actuated by a piezoelectric voltage
Ghader Rezazadeh
,
Mohammad Fathalilou
,
Rasul Shabani
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 393 KB
Your tags:
english, 2009
9
Design of micro-retainer to counter-balance spinning seismic proof mass
Nan-Chyuan Tsai
,
Bing-Hong Liou
,
Chih-Che Lin
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 793 KB
Your tags:
english, 2009
10
Erratum to: Nonsingular dislocation and crack fields: implications to small volumes
J. Kioseoglou
,
I. Konstantopoulos
,
G. Ribarik
,
G. P. Dimitrakopulos
,
E. C. Aifantis
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 129 KB
Your tags:
english, 2009
11
Miniaturization limits of piezoresistive MEMS accelerometers
Manuel Engesser
,
Axel R. Franke
,
Matthias Maute
,
Daniel C. Meisel
,
Jan G. Korvink
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 806 KB
Your tags:
english, 2009
12
An evaluation of process-parameter and part-geometry effects on the quality of filling in micro-injection moulding
Usama M. Attia
,
Jeffrey R. Alcock
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 570 KB
Your tags:
english, 2009
13
Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology
Feng Cui
,
Wenyuan Chen
,
Weiping Zhang
,
Qijun Xiao
,
Gaoyin Ma
,
Wu Liu
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 635 KB
Your tags:
english, 2009
14
Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator
Nan-Chyuan Tsai
,
Chung-Yang Sue
Journal:
Microsystem Technologies
Year:
2009
Language:
english
File:
PDF, 821 KB
Your tags:
english, 2009
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