Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography
Longhua Liu, Gang Liu, Ying Xiong, Jie Chen, Wenjie Li, Yangchao TianVolume:
16
Language:
english
Pages:
7
DOI:
10.1007/s00542-009-0972-5
Date:
August, 2010
File:
PDF, 956 KB
english, 2010