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Volume 16; Issue 8-9
Main
Microsystem Technologies
Volume 16; Issue 8-9
Microsystem Technologies
Volume 16; Issue 8-9
1
Fabrication of high hardness Ni mold with electroless nickel–boron thin layer
Yoshitaka Sawa
,
Kenji Yamashita
,
Takeshi Kitadani
,
Daiji Noda
,
Tadashi Hattori
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 477 KB
Your tags:
english, 2010
2
Molding and hot forming techniques for fabricating plastic aspheric lenses with high blue-light transmittance
Kuo-Yung Hung
,
Yi-Ko Chen
,
Shih-Hao Huang
,
Der-Chi Shye
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 606 KB
Your tags:
english, 2010
3
Effect of oxalic acid concentration on the formation of anodic aluminum oxide using pulse anodization at room temperature
Chen-Kuei Chung
,
T. Y. Liu
,
W. T. Chang
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 605 KB
Your tags:
english, 2010
4
First automated production line for X-ray-LIGA (FELIG) is brought on line
Lothar Hahn
,
Georg Schwartz
,
Volker Saile
,
Joachim Schulz
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 448 KB
Your tags:
english, 2010
5
Electroplating of nickel films at ultra low electrolytic temperature
Chen-Kuei Chung
,
W. T. Chang
,
S. T. Hung
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 560 KB
Your tags:
english, 2010
6
Thermal-deformation analysis of a polymer micro-mirror optical device
Kuo-Yung Hung
,
Chun-Der Cheng
,
Ying-Chuan Chen
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 382 KB
Your tags:
english, 2010
7
A vibrating micro-scale CMM probe for measuring high aspect ratio structures
James D. Claverley
,
Richard K. Leach
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 298 KB
Your tags:
english, 2010
8
3D UV-microreplication using cylindrical PDMS mold
Dongkeon Lee
,
Harutaka Mekaru
,
Hiroshi Hiroshima
,
Sohei Matsumoto
,
Toshiro Itoh
,
Masaharu Takahashi
,
Ryutaro Maeda
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 1.19 MB
Your tags:
english, 2010
9
Research on electrostatic actuator polymer thin-film for controlling light scattering phenomena
Kuo-Yung Hung
,
Yun-Ju Chuang
,
T. H. Liao
,
Der-Chi Shye
,
Shih-Hao Huang
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 569 KB
Your tags:
english, 2010
10
Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography
Longhua Liu
,
Gang Liu
,
Ying Xiong
,
Jie Chen
,
Wenjie Li
,
Yangchao Tian
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 956 KB
Your tags:
english, 2010
11
Design and mixing efficiency of rhombic micromixer with flat angles
C. K. Chung
,
T. R. Shih
,
B. H. Wu
,
C. K. Chang
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 494 KB
Your tags:
english, 2010
12
Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes
Yuichiro Ezoe
,
Ikuyuki Mitsuishi
,
Utako Takagi
,
Masaki Koshiishi
,
Kazuhisa Mitsuda
,
Noriko Y. Yamasaki
,
Takaya Ohashi
,
Fumiki Kato
,
Susumu Sugiyama
,
Raul E. Riveros
,
Hitomi Yamaguchi
,
Shinya Fujihira
,
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 828 KB
Your tags:
english, 2010
13
Resist-less patterning on SiO2by combination of X-ray exposure and vapor HF etching
Harutaka Mekaru
,
Makoto Fujimaki
,
Koichi Awazu
,
Masaharu Takahashi
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 732 KB
Your tags:
english, 2010
14
Inclination of mold pattern’s sidewalls by combined technique with photolithography at defocus-positions and electroforming
Harutaka Mekaru
,
Osamu Koizumi
,
Akihisa Ueno
,
Masaharu Takahashi
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 581 KB
Your tags:
english, 2010
15
Solvent-assisted low pressure room temperature lamination of low temperature cofirable ceramic green tapes for formation of embedded micro channels
Xuechuan Shan
,
H. P. Maw
,
C. W. Lu
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 605 KB
Your tags:
english, 2010
16
Development of separated micromold system for an efficient replication of high aspect ratio microstructures
Bong-Kee Lee
,
Tai Hun Kwon
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 571 KB
Your tags:
english, 2010
17
A polymer-metal hybrid flexible mould and application for large area hot roller embossing
Xuechuan Shan
,
L. Jin
,
Y. C. Soh
,
C. W. Lu
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 594 KB
Your tags:
english, 2010
18
Ceramic micro parts produced by micro injection molding: latest developments
Tobias Müller
,
Volker Piotter
,
Klaus Plewa
,
Markus Guttmann
,
Hans-Joachim Ritzhaupt-Kleissl
,
Juergen Hausselt
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 402 KB
Your tags:
english, 2010
19
Micro gear validation: improving the correlation between virtual and physical testing
Albert Albers
,
Peter Börsting
,
Tobias Deigendesch
,
Hans-Georg Enkler
,
Pablo Leslabay
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 468 KB
Your tags:
english, 2010
20
Design and microfabrication of a polymer membrane-based submicron scale electrophoretic flow detector for biomedical applications
Manouchehr Hashemi
,
Sven Achenbach
,
David Klymyshyn
,
Banafsheh Moazed
,
Jeremy Lee
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 298 KB
Your tags:
english, 2010
21
Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73)
Guocheng Shao
,
Weiping Qiu
,
Wanjun Wang
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 509 KB
Your tags:
english, 2010
22
Applying SU-8™ to the fabrication of micro electro discharge machining electrodes
Ornwasa Traisigkhachol
,
Hermann Schmid
,
Marc Wurz
,
Hans H. Gatzen
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 494 KB
Your tags:
english, 2010
23
Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application
C. K. Chung
,
K. L. Sher
,
Y. J. Syu
,
C. C. Cheng
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 745 KB
Your tags:
english, 2010
24
RMS voltage sensor based on a variable parallel-plate capacitor made of electroplated copper
Jan Dittmer
,
Lars Hecht
,
Rolf Judaschke
,
Stephanus Büttgenbach
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 645 KB
Your tags:
english, 2010
25
Fabrication of microcoils with narrow and high aspect ratio coil lines
Daiji Noda
,
Masaru Setomoto
,
Yuki Kobayashi
,
Tadashi Hattori
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 359 KB
Your tags:
english, 2010
26
Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding
S. Queste
,
R. Salut
,
S. Clatot
,
J.-Y. Rauch
,
Chantal G. Khan Malek
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 535 KB
Your tags:
english, 2010
27
Method development for epoxy resin analysis
Sawa Nordt
,
Harald Pasch
,
Wolfgang Radke
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 446 KB
Your tags:
english, 2010
28
High aspect ratio micromolds for the electroplating of micro electro discharge machining tools
Ornwasa Traisigkhachol
,
Hans H. Gatzen
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 581 KB
Your tags:
english, 2010
29
Micro gear pump with internal electromagnetic drive
Andreas Waldschik
,
Stephanus Büttgenbach
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 654 KB
Your tags:
english, 2010
30
Direct bonding of PFTF sheets assisted by shynchrotron radiation induced surface modification
Yuichi Utsumi
,
Shigeaki Yamamoto
,
Tomoyuki Kuroki
,
Masaaki Okubo
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 370 KB
Your tags:
english, 2010
31
Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography
Mitsuhiro Horade
,
Susumu Sugiyama
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 845 KB
Your tags:
english, 2010
32
Easily manageable, electrothermally actuated silicon micro gripper
B. Hoxhold
,
S. Büttgenbach
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 804 KB
Your tags:
english, 2010
33
Patterns for design in microtechnology
Albert Albers
,
Tobias Deigendesch
,
Tarak Turki
,
Tobias Müller
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 567 KB
Your tags:
english, 2010
34
Micro liquid rotor operated by surface-acoustic-wave
Tsunemasa Saiki
,
Katsuhide Okada
,
Yuichi Utsumi
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 1024 KB
Your tags:
english, 2010
35
How mold inserts influence the replication of metallic microparts produced by electroplating into two-component templates
Juergen Prokop
,
Jochen Heneka
,
Julia Lorenz
,
Kai Moehwald
,
Volker Piotter
,
Hans-Joachim Ritzhaupt-Kleissl
,
Karoline Vetter
,
Juergen Hausselt
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 570 KB
Your tags:
english, 2010
36
Fabrication of UV range light guide plate
Yuta Okayama
,
Kenji Yamashita
,
Yoshitaka Sawa
,
Daiji Noda
,
Tadashi Hattori
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 576 KB
Your tags:
english, 2010
37
Fabrication of micro-capacitive inclination sensor by resin molding
Hiroaki Miyake
,
Kazufumi Nishimoto
,
Satoshi Nishida
,
Daiji Noda
,
Tadashi Hattori
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 655 KB
Your tags:
english, 2010
38
Immunoassay using poly-tetrafluoroethylene microstructure in organic solvent
Yoshiaki Ukita
,
Saki Kondo
,
Chiwa Kataoka
,
Masahiro Takeo
,
Seiji Negoro
,
Yuichi Utsumi
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 438 KB
Your tags:
english, 2010
39
Thickness measurement in ultrathick multilayer microstructures
Rainer Engelke
,
Uwe Richter
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 285 KB
Your tags:
english, 2010
40
Fabrication of X-rays mask with carbon membrane for diffraction gratings
Naoki Takahashi
,
Hiroshi Tujii
,
Megumi Katori
,
Kenji Yamashita
,
Daiji Noda
,
Tadashi Hattori
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 561 KB
Your tags:
english, 2010
41
Development of a biological detection platform utilizing a modular microfluidic stack
Niklas Frische
,
Proyag Datta
,
Jost Goettert
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 543 KB
Your tags:
english, 2010
42
A wireless powered fully integrated SU-8-based implantable LC transponder
Sung-Hoon Cho
,
Sang-Hee Son
,
Hoon-Ju Chung
,
Jeong-Bong Lee
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 603 KB
Your tags:
english, 2010
43
Synchrotron laboratory for micro and nano devices: facility concept and design
Sven Achenbach
,
Venkat Subramanian
,
David Klymyshyn
,
Garth Wells
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 408 KB
Your tags:
english, 2010
44
Methods for simulating and optimizing molded micro components and systems
Albert Albers
,
Hans-Georg Enkler
,
Pablo Leslabay
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 719 KB
Your tags:
english, 2010
45
Electropolishing as a method for deburring high aspect ratio nickel RF MEMS
Stephanie Kissling
,
Klaus Bade
,
Martin Börner
,
David M. Klymyshyn
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 569 KB
Your tags:
english, 2010
46
Hot embossing of poly(lactic acid) films for an embedded cochlear implant stiffener
R. Tewari
,
C. Friedrich
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 691 KB
Your tags:
english, 2010
47
Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer
Daiji Noda
,
Hiroshi Tsujii
,
Naoki Takahashi
,
Tadashi Hattori
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 449 KB
Your tags:
english, 2010
48
In situ diagnostic capabilities for beam position and beam intensity monitoring at SyLMAND
Venkat Subramanian
,
Sven Achenbach
,
David Klymyshyn
,
Garth Wells
,
Wade Dolton
,
Vinay Nagarkal
,
Brian Yates
,
Curtis Mullin
,
Martin Augustin
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 267 KB
Your tags:
english, 2010
49
Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses
Guocheng Shao
,
Wanjun Wang
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 632 KB
Your tags:
english, 2010
50
Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
Seichin Kinuta
,
Yoshiaki Saita
,
Masashi Kobayashi
,
Martin Boerner
,
Volker Saile
,
Sumio Hosaka
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 428 KB
Your tags:
english, 2010
51
The effect of the aspect ratio on the hydrophobicity of microstructured polydimethylsiloxane (PDMS) robust surfaces
Jihoon Yeo
,
Dong Sung Kim
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 676 KB
Your tags:
english, 2010
52
Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009
Sven Achenbach
,
David Klymyshyn
,
Bernd Michel
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 124 KB
Your tags:
english, 2010
53
Vertical liquid transportation through capillary bundle structure using centrifugal force
Saki Kondo
,
Tsukasa Azeta
,
Yoshiaki Ukita
,
Yuichi Utsumi
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 677 KB
Your tags:
english, 2010
54
Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert
Jihoon Yeo
,
Jejun Ryu
,
Bong-Kee Lee
,
Euihyeon Byeon
,
Tai Hun Kwon
,
Dong Sung Kim
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 433 KB
Your tags:
english, 2010
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