Adhesive wafer bonding with photosensitive polymers for...

Microsystem Technologies 2010 / 05 Vol. 16; Iss. 5

Adhesive wafer bonding with photosensitive polymers for MEMS fabrication

Erkan Cakmak, Viorel Dragoi, Elliott Capsuto, Craig McEwen, Eric Pabo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Pages:
10
DOI:
10.1007/s00542-009-0977-0
Date:
May, 2010
File:
PDF, 385 KB
english, 2010
Conversion to is in progress
Conversion to is failed