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Volume 16; Issue 5
Main
Microsystem Technologies
Volume 16; Issue 5
Microsystem Technologies
Volume 16; Issue 5
1
Tactile sensors based on conductive polymers
Julián Castellanos-Ramos
,
Rafael Navas-González
,
Haritz Macicior
,
Tomasz Sikora
,
Estíbalitz Ochoteco
,
Fernando Vidal-Verdú
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 1.23 MB
Your tags:
english, 2010
2
Adhesive wafer bonding with photosensitive polymers for MEMS fabrication
Erkan Cakmak
,
Viorel Dragoi
,
Elliott Capsuto
,
Craig McEwen
,
Eric Pabo
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 385 KB
Your tags:
english, 2010
3
Piezoresistive biochemical sensors based on hydrogels
Margarita Guenther
,
Gerald Gerlach
,
Thomas Wallmersperger
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 675 KB
Your tags:
english, 2010
4
A dynamical envelope model for vibratory gyroscopes
Markus Egretzberger
,
Andreas Kugi
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 448 KB
Your tags:
english, 2010
5
MEMS fluxgate magnetometer for parallel robot application
Maren Ramona Kirchhoff
,
Stephanus Büttgenbach
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 269 KB
Your tags:
english, 2010
6
Gel-based biochip for the detection of airborne contaminants
Katrin Schmitt
,
Gerd Sulz
,
Thorsten Klockenbring
,
Björn Seidel
,
Andreas Holländer
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 328 KB
Your tags:
english, 2010
7
Manufacturing, assembling and packaging of miniaturized neural implants
Thomas Stieglitz
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 456 KB
Your tags:
english, 2010
8
Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering
Michaela Grosser
,
M. Münch
,
J. Brenner
,
M. Wilke
,
H. Seidel
,
C. Bienert
,
A. Roosen
,
U. Schmid
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 396 KB
Your tags:
english, 2010
9
Influence of a chip scale package on the frequency response of a MEMS microphone
Matthias Winter
,
Gregor Feiertag
,
Anton Leidl
,
Helmut Seidel
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 644 KB
Your tags:
english, 2010
10
Vibration energy scavenging via piezoelectric bimorphs of optimized shapes
Denis Benasciutti
,
Luciano Moro
,
Saša Zelenika
,
Eugenio Brusa
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 534 KB
Your tags:
english, 2010
11
Design of self-assembling micromirror arrays for light guiding applications
Qingdang Li
,
Andreas Jäkel
,
Volker Viereck
,
Hartmut Hillmer
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 356 KB
Your tags:
english, 2010
12
Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid
Tomás Manzaneque
,
J. Hernando
,
L. Rodríguez-Aragón
,
A. Ababneh
,
H. Seidel
,
U. Schmid
,
J. L. Sánchez-Rojas
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 387 KB
Your tags:
english, 2010
13
Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials
Christian Bolzmacher
,
Karin Bauer
,
Ulrich Schmid
,
Moustapha Hafez
,
Helmut Seidel
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 331 KB
Your tags:
english, 2010
14
Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators
Jorge Hernando
,
Jose Luis Sánchez-Rojas
,
Ulrich Schmid
,
Abdallah Ababneh
,
Günter Marchand
,
Helmut Seidel
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 350 KB
Your tags:
english, 2010
15
MOEMS translatory actuator characterisation, position encoding and closed-loop control
M. Lenzhofer
,
A. Tortschanoff
,
A. Frank
,
T. Sandner
,
H. Schenk
,
M. Kraft
,
A. Kenda
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 510 KB
Your tags:
english, 2010
16
Growth of ZnO nanorods on patterned templates for efficient, large-area energy scavengers
G. Niarchos
,
E. Makarona
,
C. Tsamis
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 648 KB
Your tags:
english, 2010
17
Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process
Ü. Sökmen
,
A. Stranz
,
S. Fündling
,
S. Merzsch
,
R. Neumann
,
H.-H. Wehmann
,
E. Peiner
,
A. Waag
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 969 KB
Your tags:
english, 2010
18
Flip chip packaging for MEMS microphones
Gregor Feiertag
,
Matthias Winter
,
Anton Leidl
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 423 KB
Your tags:
english, 2010
19
Adsorption–desorption noise in plasmonic chemical/biological sensors for multiple analyte environment
Olga Jakšić
,
Zoran Jakšić
,
Jovan Matović
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 429 KB
Your tags:
english, 2010
20
Magnetic resonant harvesters and power management circuit for magnetic resonant harvesters
Tomáš Jirků
,
Pavel Fiala
,
Martin Kluge
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 1.30 MB
Your tags:
english, 2010
21
Power sensitivity of vibration energy harvester
Zdenek Hadas
,
Cestmir Ondrusek
,
Vladislav Singule
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 611 KB
Your tags:
english, 2010
22
High-resolution eddy current sensor system for quality assessment of carbon fiber materials
Martin H. Schulze
,
Henning Heuer
,
Martin Küttner
,
Norbert Meyendorf
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 629 KB
Your tags:
english, 2010
23
Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems: design, fabrication, characterization and optimization
J. Hildenbrand
,
C. Peter
,
F. Lamprecht
,
A. Kürzinger
,
F. Naumann
,
M. Ebert
,
R. Wehrspohn
,
J. G. Korvink
,
J. Wöllenstein
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 519 KB
Your tags:
english, 2010
24
A comparative analyze of fundamental noise in cantilever sensors based on lateral and longitudinal displacement: case of thermal infrared detectors
Jovan Matović
,
Zoran Jakšić
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 443 KB
Your tags:
english, 2010
25
What happens turning a 250-μm-thin piezo-stack sideways?
Sandy Zaehringer
,
Norbert Schwesinger
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 553 KB
Your tags:
english, 2010
26
Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems
Saskia Biehl
,
Sebastian Staufenbiel
,
Frank Hauschild
,
André Albert
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 343 KB
Your tags:
english, 2010
27
Special Issue of the Conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE Europe Symposium ‘Microtechnologies for the New Millennium’ Dresden, Germany, 4–6 May 2009
Thomas Becker
,
Ulrich Schmid
,
Bernd Michel
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 106 KB
Your tags:
english, 2010
28
Single crystalline silicon based surface micromachining for high precision inertial sensors: technology and design for reliability
R. Knechtel
Journal:
Microsystem Technologies
Year:
2010
Language:
english
File:
PDF, 658 KB
Your tags:
english, 2010
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