Influence of a chip scale package on the frequency response of a MEMS microphone
Matthias Winter, Gregor Feiertag, Anton Leidl, Helmut SeidelVolume:
16
Language:
english
Pages:
7
DOI:
10.1007/s00542-009-0994-z
Date:
May, 2010
File:
PDF, 644 KB
english, 2010