![](/img/cover-not-exists.png)
Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding
S. Queste, R. Salut, S. Clatot, J.-Y. Rauch, Chantal G. Khan MalekVolume:
16
Language:
english
Pages:
9
DOI:
10.1007/s00542-010-1020-1
Date:
August, 2010
File:
PDF, 535 KB
english, 2010