Study on fabrication of 3-D microstructures by synchrotron...

Microsystem Technologies 2010 / 08 Vol. 16; Iss. 8-9

Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography

Mitsuhiro Horade, Susumu Sugiyama
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Volume:
16
Language:
english
Pages:
8
DOI:
10.1007/s00542-010-1036-6
Date:
August, 2010
File:
PDF, 845 KB
english, 2010
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