Knowledge based support for manufacturing of...

Microsystem Technologies 1996 / 10 Vol. 2; Iss. 4

Knowledge based support for manufacturing of microstructures

K. P. Scherer, P. Buchberger, H. Eggert, P. Stiller, U. Stucky
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Volume:
2
Language:
english
Pages:
4
DOI:
10.1007/s005420050037
Date:
October, 1996
File:
PDF, 295 KB
english, 1996
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