Volume 2; Issue 4

Microsystem Technologies

Volume 2; Issue 4
1

LIGA activity in Taiwan

Y. Cheng
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 500 KB
english, 1996
2

Combination of LIGA with other microstructure technologies

W. Menz, W. Bacher, W. Bier, O. F. Hagena, J. Mohr, D. Seidel
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 1.65 MB
english, 1996
3

Knowledge based support for manufacturing of microstructures

K. P. Scherer, P. Buchberger, H. Eggert, P. Stiller, U. Stucky
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 295 KB
english, 1996
4

The study of LIGA technique at NSRL

Y. Tian, Y. Hong, S. Fu, Y. Hu, Y. Kan, X. Tao
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 957 KB
english, 1996
6

Electrochemical post-processing of LIGA structures

S. Akkaraju, Y. M. Desta, B. Q. Li, M. C. Murphy
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 962 KB
english, 1996
7

Molding of LIGA microstructures from fluorinated polymers

R. Ruprecht, H. Kalb, B. Kowanz, W. Bacher
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 389 KB
english, 1996
8

Application of deep reactive ion etching for silicon angular rate sensor

J. Choi, K. Minami, M. Esashi
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 803 KB
english, 1996
9

Design and simulation of high aspect ratio motion sensors

L. Yao, E. Chowanietz, M. McCormick, A. Lees
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 384 KB
english, 1996
10

Experimental determination of mechanical properties of Ni and Ni-Fe microbars

E. Mazza, S. Abel, J. Dual
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 441 KB
english, 1996