The study of LIGA technique at NSRL

Microsystem Technologies 1996 / 10 Vol. 2; Iss. 4

The study of LIGA technique at NSRL

Y. Tian, Y. Hong, S. Fu, Y. Hu, Y. Kan, X. Tao
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Volume:
2
Language:
english
Pages:
3
DOI:
10.1007/s005420050038
Date:
October, 1996
File:
PDF, 957 KB
english, 1996
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