Molding of LIGA microstructures from fluorinated polymers

Microsystem Technologies 1996 / 10 Vol. 2; Iss. 4

Molding of LIGA microstructures from fluorinated polymers

R. Ruprecht, H. Kalb, B. Kowanz, W. Bacher
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Volume:
2
Language:
english
Pages:
4
DOI:
10.1007/s005420050041
Date:
October, 1996
File:
PDF, 389 KB
english, 1996
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