Alternative resist adhesion and electroplating layers for...

Microsystem Technologies 2000 / 08 Vol. 6; Iss. 5

Alternative resist adhesion and electroplating layers for LIGA process

A. El-Kholi, K. Bade, J. Mohr, F. J. Pantenburg, X.-M. Tang
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Volume:
6
Language:
english
Pages:
4
DOI:
10.1007/s005429900035
Date:
August, 2000
File:
PDF, 137 KB
english, 2000
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